Introduction
SC-UV series UV ozone cleaner machine: It is a dry fine cleaning equipment that can be used to clean various single crystal substrates to ensure better film quality. At the same time, it can also remove photoresist, improve material surface wettability, clean SEM and TEM samples, and UV activated polymers.
UV ozone cleaning provides an acid free, dry, and non-destructive atomic level cleaning method, particularly suitable for removing some organic compounds. UV lamps mainly emit two wavelengths of light: 185nm and 254nm. 185nm light can convert oxygen in the air into ozone, while 254nm light can break bonds (especially carbon carbon bonds) in compounds; So the combination of these two wavelengths of light can effectively remove organic compounds.
Features of UV ozone cleaner
★Dry cleaning: no liquid solvent required, no waste liquid generated
★Room temperature operation: No need for high temperature or vacuum environment, can operate at atmospheric pressure
★No damage: Compared to plasma treatment, there is no charge damage to precision devices
★Normal pressure operation: No need for vacuum system, easy to operate
★Low cost: compact equipment suitable for laboratory and mass production
★Easy to operate: compact device, easy to operate
★Cost effectiveness: Lower cost compared to other clean technologies
Application
1.Cleaning of semiconductor silicon wafers, gallium arsenide, and sapphire substrates
2.Cleaning of LCD, OLED, and integrated circuits in the electronics industry
3.Cleaning of optical components such as glass, quartz, lenses, and optical lenses
4.Surface modification improves the hydrophilicity and wettability of materials
5.Photolithography process includes photoresist removal and photoresist stripping
6.Research equipment AFM probe sharpening, SEM/TEM sample processing
7.Assembly and bonding of PDMS/glass microfluidic devices
Operation process
1.Place the sample to be cleaned on the sample table
2.Close the equipment cabin door (activate safety interlock)
3.Set cleaning time (usually a few minutes to half an hour)
4.Start the device and the UV lamp starts working
5.After cleaning is completed, take out the sample